Lamination and delamination technique for thin film processing

ABSTRACT

This invention discloses a releasable adhesion layer having good adhesion during high temperature fabrication process in the absence of light, and delaminating at a lower temperature in the presence of light. One embodiment of this invention is a film of polymer whose thermal decomposition temperature changes drastically upon photoexposure. These materials, prior to photoexposure, can withstand temperatures in the range of approximately 200° C. to 300° C. without decomposition, yet decompose at around 100° C. with photoexposure. The releasable adhesion layer can be used in a thermal transfer element, sandwiching a donor substrate and a transfer layer having a plurality of multicomponent transfer units. In the absence of light, the releasable adhesion layer can sustain high temperature processing of these multicomponent transfer units. By photoexposing according to a pattern, the photoexposed multicomponent transfer units can be selectively released at a low temperature to transfer to a receptor.

This application is a continuation of U.S. patent application Ser. No.10/444,435, filed May 23, 2003, hereby incorporated by reference.

FIELD OF THE INVENTION

This invention relates to thin film device transfer elements and methodsof transferring thin film devices to a receptor. In particular, theinvention relates to the problem of producing devices on substrateswhose thermal, mechanical or optical properties may be incompatible withthe processing conditions necessary to fabricate such devices.

BACKGROUND OF THE INVENTION

In the manufacturing of thin film device products, thin film devicessuch as field effect transistors (FET), thin film transistors (TFT),light emitting diodes (LED), memory circuits, display circuits oroptical devices are fabricated on a substrate through various processessuch as chemical vapor deposition, etching, oxidation, and annealing.Since the fabrication processes often involve high temperaturetreatment, one of the substrate requirements is high temperature heatresistance, meaning the substrate must have a high softening temperatureand a high melting temperature. To minimize film stress and maintaingood alignment of different patterned layers, it should also have a lowcoefficient of thermal expansion and low distortion after thermalcycling.

Thin film transistor (TFT) processes for liquid crystal displayscurrently use quartz glass substrates to provide heat resistance up toapprox. 1000° C., or heat-resistant glass substrate to provide heatresistance up to approx. 500° C. However, quartz and heat resistantglass substrates are expensive, heavy and fragile.

Low temperature thin film transistor processes on plastic substrate havebeen demonstrated, for example,

-   -   U.S. Pat. No. 5,742,075, “Amorphous Silicon on Insulator VLSI        Circuit Structures” by Stanley G. Burns et al;    -   U.S. Pat. No. 5,796,121, “Thin Film Transistors Fabricated on        Plastic Transistors”, by Stephen McConnell Gates, and    -   U.S. Pat. No. 5,817,550, “Method for Formation of Thin Film        Transistors on Plastic Substrates”, by Paul G. Carey et al.,        but in general, temperatures up to around 200-300° C. may be        required to get good device performance as indicated by charge        carrier mobility or low interface state density. Polymer        substrates which can tolerate these temperatures do exist; for        example, polyimides, poly(ether sulphone)s, polycarbonates,        polyaramids. But these polymer substrates are often colored,        very expensive, have high water absorbance and less than ideal        thermal and mechanical properties.

In contrast, the ideal product substrate is preferably as inexpensive aspossible, light weight, transparent, resistant to deformation to acertain extent, and invulnerable to dropping. Thus there is a differencebetween the requirements of a substrate for fabrication processes andthe characteristics desirable for a product substrate. It has beenextremely difficult to satisfy both these required process conditionsand desirable product characteristics.

The substrate transfer method can be used to address the above problems.The thin film devices are fabricated on a donor substrate having thedesired optimal properties for fabrication processes in which the donorsubstrate has been first coated with a suitable releasable adhesionlayer. Then the fabricated thin film devices are transferred to a targetsubstrate (or a receptor) having the desired product characteristics.For example, see Wolk et al., U.S. Pat. No. 6,114,088, and itsdivisions, U.S. Pat. No. 6,221,553 and U.S. patent publication2001/0036561, “Thermal transfer element for forming multilayer devices”,and Inoue et al., U.S. Pat. No. 6,521,511, “Thin film device transfermethod, thin film device, thin film integrated circuit device, activematrix board, liquid crystal display, and electronic apparatus”.

However, the most difficult aspect of the substrate transfer method isthe selection of the releasable adhesion layer. Currently to the best ofour knowledge, there is no suitable releasable adhesion layer, one thatcan provide good adhesion during high temperature fabrication processingand at the same time can delaminate at a low temperature fortransferring to a target substrate.

SUMMARY OF THE INVENTION

This invention provides a lamination-transfer, orlamination-delamination, process employing a releasable adhesion layerhaving good adhesion and excellent mechanical stability during hightemperature fabrication processes of thin film devices in the absence oflight, and delaminating at a lower temperature in the presence of lightfor transferring to a target substrate.

One embodiment of this invention is a film of polymer whose thermaldecomposition temperature changes drastically upon photoexposure.Examples of such materials are phthalaldehyde, polycarbonates andpolyformals. However, the subject of this invention is a polymer whosethermal decomposition temperature changes drastically upon photoexposureand not limited to just these polymers. These polymers preferably havean additive of light activated acid catalyst to further reduce thedecomposition temperature.

These polymers, prior to photoexposure, can withstand temperatures inthe range of approximately 200° C. to 300° C. without decomposition, yetdecompose at around 100° C. with photoexposure. The polymer decomposescleanly into highly volatile, gaseous products, leaving both the devicecomposite and the substrate available for the next process steps.

The light source can be visible light, ultraviolet light, or x-ray, withlow intensity. The delamination can be localized by selectively exposinga portion of the releasable adhesion layer to light. The transfer layeror the donor substrate is preferably transparent with respect to thelight source to allow the light to reach the releasable adhesion layer.

These photo enhanced decomposition polymers can be used as a releasableadhesion layer in a thermal transfer element comprising a donorsubstrate and a multicomponent transfer layer. The multicomponenttransfer layer can be processed in the absence of light, and thereforecan sustain high temperature. Upon completion of the fabricationprocess, the multicomponent transfer layer is transferred to a receptorsuitable for product characteristics using low temperature withphotoexposure.

The multicomponent transfer layer can include a plurality ofmulticomponent transfer units. The multicomponent transfer unit cancomprise a complete device, a complete circuit, or only a processedlayer.

The multicomponent transfer unit can be released or transferred to areceptor substrate selectively by applying photoexposure selectivelytogether with the heating step. The photoexposing and the heating stepscan occur simultaneously, or the heating following the photoexposingstep.

The present invention also discloses a device disposed on a receptorsubstrate, in which the device is formed by transferring amulticomponent transfer unit from a thermal transfer element to thereceptor substrate. The device on the multicomponent transfer unit ofthe newly formed thermal transfer element can be transferred again to anew receptor.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows an embodiment of the thermal transfer element according tothe present invention.

FIGS. 2 a and 2 b show other embodiments of the present inventionthermal transfer element.

FIG. 3 shows another embodiment of the present invention thermaltransfer element.

FIGS. 4 a-4 g show an embodiment of the preparation of a thermaltransfer element.

FIGS. 5 a-5 c show an embodiment of the method of transfer of amulticomponent transfer unit from a thermal transfer element.

FIGS. 6 a-6 c show another embodiment of the method of transfer of amulticomponent transfer unit from a thermal transfer element to areceptor.

FIGS. 7 a-7 g show the transfer sequence of 2 consecutive transfersaccording to the present invention.

FIG. 8 shows an overall view of the transfer process in the context ofweb-based, or roll-to-roll transfer.

FIG. 9 shows another embodiment of the transfer process.

FIGS. 10 a-10 c show a sequence of the pattern transfer process.

DETAILED DESCRIPTION OF THE INVENTION

The present invention lamination-transfer, or lamination-delamination,or simply transfer process offers a solution to the mismatchingsubstrate problem between the requirements of a substrate forfabrication processes and the characteristics desirable for a productsubstrate.

The disclosed transfer process involves the following steps:Semiconducting or other thin film devices with fine patterns arefabricated on a substrate with the desired optimal properties forfabrication that has been first coated with a suitable releasableadhesion layer. Subsequently, a second substrate with the desiredproperties for the target use of the fabricated semiconductor device islaminated onto the top of the devices. A trigger process is used toseparate the devices from the fabrication substrate resulting in thesemiconductor devices being attached to the second substrate. Thisprocess may be used with either finished devices (typically multilayerin construction), or with individual layers which are successivelytransferred to fabricate a finished device. In the descriptions of theinvention, the words “device” and “device layer” will refer to bothpossibilities.

If the target substrate is coated with the suitable releasable adhesionlayer, the process can be repeated to a new target substrate. The secondtransfer can be useful to preserve the up/down position of the thin filmdevice.

Lamination and delamination are common techniques. Many materials withspecifically tailored adhesives and release properties are known tothose skilled in the art in this industry. However, lamination anddelamination are often two distinct properties, and very often notcomplementary. The chemistry of the adhesive must be carefullyengineered for each application. As a result, the resulting surfacecould stick to a target surface tightly (in the case of a typical tape),moderately (for example masking tape) or weakly (to a carrier substrate,such as for stickers, stamps, labels, etc.). However, while surfaces canbe designed for either strong adhesion or easy release, it is difficultto switch from one to the other. Thus, for example, there is notavailable a mechanism to provide strong adhesion of two surfaces for alimited time, and then switch the properties to weak or no adhesion toallow delamination.

The present application discloses a releasable adhesion layer whichprovides good adhesion and excellent mechanical stability during thefabrication of devices such as roll-to-roll processing at the requiredprocess temperatures, but which will delaminate cleanly at the desiredtime so that the expensive fabrication substrate may be reused.Preferably this transfer should be susceptible to patternwise use, sothat specific portions of a film or device can be selected andtransferred according to need. The present invention offers significantimprovement over ordinary lamination materials commonly used in webproducts.

One embodiment of this invention is a film of polymer whose thermaldecomposition temperature changes drastically upon photoexposure.Examples of such materials are phthalaldehyde, polycarbonates andpolyformals. However, the subject of this invention is a polymer whosethermal decomposition temperature changes drastically upon photoexposureand not limited to just these polymers.

The polycarbonate preferably comprises a plurality of a tertiary carbonnext to one carbonate carbonyl per monomer unit to stabilize carboniumion formation. The polyformal preferably comprises a bisallylic diol ora bisbenzylic diol with a dihalomethane (source of —CH2-unit) permonomer unit. Polymers such as phthalaldehyde have a large decompositiontemperature difference directly upon exposure to light. Adding lightactivated acid or base catalyst would reduce the decompositiontemperature with photoexposure. Thus polymers such as polycarbonates andpolyformals preferably have an additive of light activated acidcatalyst. Upon light exposure, the light activated acid catalystreleases hydrogen ions which cleave the polymers to significantly reducethe decomposition temperature. The common light activated acid catalystsare such compounds as onium salts, for example diphenyliodonium ortriphenylsulfonium salts of non-nucleophilic anions such ashexafluorophosphonium, trifluorosulfonate, and others. These aredescribed for example by T. Ueno, in “Microlithography: Science andTechnology”, J. R. Sheats and B. W. Smith, editors (Marcel Dekker, Inc.,1998), p. 451-476, hereby incorporated by reference. There are otheracid and base catalysts, including organohalogen compounds such astrichloromethyl-s-triazine, o- and p-nitrobenzyl esters,alkylsulfonates, α-hydroxymethylbenzoin sulfonic acid esters,α-sulfonyloxyketones, diazonaphthoquinone sulfonates,α,α′-bisarylsulfonyl diazomethanes, and disulfones, and other thermallydecomposable polymers including polysilylethers and O,O- andN,O-acetals.

These polymers, prior to photoexposure, can withstand temperatures inthe range of approximately 200° C. to 300° C. without decomposition, yetdecompose at around 100° C. with photoexposure. The effectivephotoexposure can be a wide spectrum of wavelengths, or a narrowspectrum of wavelength or only a particular wavelength to preventaccidental release. The polymer can be designed to decompose at lowertemperature such as room temperature with photoexposure, however, areasonable temperature such as 100° C. is assurance that thedecomposition will not be accidentally released. The combination oflight and temperature is the safeguard against such accidental release.The polymer decomposes cleanly into highly volatile, gaseous products,leaving both the device composite and the substrate available for thenext process steps.

Phthalaldehyde decomposes in the presence of heat and light as follows:

A typical polycarbonate can decompose in the presence of light and heatas follows:

The key element of the polycarbonates is a tertiary carbon next to onecarbonate carbonyl to stabilize carbonium ion formation. Thereforeinstead of the —C(CH₃)—C(CH₃)— as in the above example, one can use a R′substitution, and the general polycarbonate will be:

The R′ substitution can be

Polycarbonates with one CO₃ per monomer unit also work, for example:

This polymer decomposes into CO₂ and H₂O, plus a combination of thefollowing compounds

In general, polycarbonates with one CO₃ per monomer unit can be written:

There is also a variety of substitutions on the organic sub-units forthese polymers.

The polyformals can be bisallylic diol:

with a general formula having a substitution R on the organic sub-unit—CH₂—

The polyformals can be bisbenzylic diol:

with a general formula having a substitution R on the organic sub-unit—CH₂—

The polymers presented above are just examples of a class of polymerswhose decomposition temperature changes significantly withphotoexposure. It is to be understood that both these general anddetailed descriptions are exemplary, and are not restrictive of theinvention.

The light source for the photoexposure can be visible light, ultravioletlight, or x-ray, with the intensity of less than 1 W/cm². Infrared lightcan be used, however its photoexposure effect is not as good as theshorter wavelength lights since infrared light tends to easily convertto thermal energy. The delamination can be localized by selectivelyexposing a portion of the releasable adhesion layer to light. Thetransfer layer or the donor substrate is preferably transparent withrespect to the light source to allow the light to reach the releasableadhesion layer. The term transparent means good light transmission, andtherefore a thin metal substrate such as aluminum is transparent if anx-ray light is used. Laser light can also be used, but other lightsources are preferable due to their cost effectiveness.

This invention does not require an intense light or heat source. Thelight intensity can be very low (less than 100 milliwatts per cm² fortypical photosensitizer concentrations as used in microlithographyformulations), and so common non-laser light sources can be used to givehigh throughput at low cost. The subsequent heating can be obtained fromcommon large-area sources such as are commonly used in drying tunnels,for example, in web coating. Alternatively, for enhanced process controla confined infrared or thermal line source, which emits in a line thatis narrow along the web direction but stretches across it in thetransverse direction, may be used. Suitable down-web dimensions are ofthe order of 1-10 millimeters, and so may be readily obtained fromconventional (non-laser) sources which are advantageous in cost and havehigh energy efficiencies.

In addition to photodecomposition initiated by visible or ultravioletlight, x-rays may be used along with x-ray sensitizers for generatingcatalytic acids or bases for use with the thermally decomposablepolymers. Since for most applications no collimation or fine resolutionof the x-ray beam is needed, the source can be inexpensive andefficient. This allows substrates to be used which are completely opaqueto ultraviolet or visible light.

When high spot placement accuracy is required, a laser can beparticularly useful as the light source.

While polymers are typically used in web processing for their handlingproperties and low cost, metal foils can also be used as substrates. Inthis case process temperature constraints are minimized, and althoughthe coefficient of thermal expansion of metals in usually larger byseveral fold than that of silicon, the mismatch is no worse that betweensilicon and the interconnect metalization. If a metal substrate is used,the present invention is also applicable. Light-induced release is notpossible by backside radiation, but x-rays may be used if the foil isthin or is comprised of a low atomic weight element such as aluminum.Visible or ultraviolet light may still be applied from the front side ifthe devices are partially transparent, which is often the case. Forexample, polysilicon TFTs, indium tin oxide (ITO) electrodes, andpolymer transistors transmit substantial amounts of light; evenamorphous silicon TFTs are not completely opaque.

The fact that the substrate surface is easily restored to a pristinestate, and the material is mechanically highly durable, so that it canbe reused almost indefinitely, is an advantage of using metal.

The present invention releasable adhesion layer using these polymersalso provides a high degree of chemical cleanliness. The releasableadhesion layer does not remain in place, and therefore will notcontaminate the transferred device. The present materials are known todecompose completely, with no detectable residue. Hence sensitiveorganic layers, such as might be found, for example, in organic lightemitting diodes or organic transistors, will experience negligiblecontamination if transferred by this technique. A vacuum orifice can beadvantageously placed close to the line of delamination, to collect thegaseous products and prevent them from condensing on surfaces where theyare not wanted.

Another embodiment of the present invention is a thermal transferelement utilizing these polymers as the releasable adhesion material.FIG. 1 shows a thermal transfer element 10 comprising a donor substrate11 and a multicomponent transfer layer 13 with the releasable adhesionlayer 12 between the donor substrate 11 and the multicomponent transferlayer 13. The multicomponent transfer layer can be processed in theabsence of light, and therefore can sustain high temperature. Up tocompletion of the fabrication process, the multicomponent transfer layercan be transferred to a receptor suitable for product characteristics.The transfer process can be performed at low temperature withphotoexposure.

The donor substrate in the disclosed thermal transfer element can be apolymer substrate, a paper substrate, a glass substrate, a semiconductorsubstrate, or a metal substrate. Other films with sufficient opticalproperties (if light is used for heating and transfer), including hightransmission of light at a particular wavelength, as well as sufficientmechanical and thermal stability for the particular application, can beused. The donor substrate main characteristic is to satisfy all therequirements necessary for the fabrication of the multicomponenttransfer layer. The multicomponent transfer layer can comprise a memorydevice, a semiconductor device such as field effect transistor, bipolartransistor, metal-oxide-semiconductor field effect transistor, a thinfilm transistor, a display device such as LED, OLED, flat panel display,an electronic device or an electronic or optical component such asresistor, capacitor, inductive coil, or waveguide.

The substrate such as a degassed polyimide is coated with a thin film,typically about 1 micron thick, of the release polymer, which may or maynot be followed by a matching layer that is optimized for the depositionof subsequent device films. While the release layer is optimally about 1micron thick in most cases, it may be much thinner or thicker, in therange of 0.1 micron or less to at least 10 microns. Factors which governthe choice of thickness include the amount of force that one wishes todevelop when the release layer is decomposed, the roughness of thesubstrate, the speed of coating required, and the optical density of thefilm if photoexposure is required to effect decomposition.

A variety of coating techniques known in the art can be used; forexample, roll coating, slot die coating, gravure coating, and so on. Thecoating technique can be selected to optimize the coating quality for aparticular polymer and substrate combination. While the invention hasbeen conceived with respect to the needs of web processing, it may alsobe used with rigid substrates, in which case spin coating is a viablecoating technique for the release layer.

The matching layer can be either thicker or thinner than the releaselayer. It could be, for example, a castable polyimide which is cured toprovide a heat and chemical resistant covering for the devices. It couldalso be an inorganic layer. After the final substrate lamination, thislayer will form the encapsulation layer for the devices. In some casesthis layer will not be used; for example if additional layers are to bedeposited on the devices after the transfer, then no protective layerwould be wanted.

FIG. 2 a shows a thermal transfer element with the multicomponenttransfer layer 23 comprising a thin film transistor having a gate 15, asource 16 and a drain 17, disposed on a releasable adhesion layer 22 ona donor substrate 21. And FIG. 2 b shows a thermal transfer element withthe multicomponent transfer layer 33 comprising a field effecttransistor having a gate 25, a source 26 and a drain 27, disposed on areleasable adhesion layer 32 on a donor substrate 31.

In another embodiment of the invention, the multicomponent transferlayer includes a plurality of multicomponent transfer units to betransferred. The multicomponent transfer units can be selectivelyreleased by exposing only these multicomponent transfer units to light.The heating can be applied to the whole transfer layer, or only theseselected multicomponent transfer units. The light and heat is needed atthe adhesion layer to decompose the adhesion layer film, but theexposure of light and heat is preferably applied through the transferlayer or the donor substrate and transferred to the adhesion layer.

FIG. 3 shows a thermal transfer element having three multicomponenttransfer units 43 a, 43 b and 43 c, disposed on a releasable adhesionlayer 42 on a donor substrate 41. The multicomponent transfer units 43 aand 43 b are separated by an air gap 44 to facilitate the selectiverelease of one multicomponent transfer unit without disturbing theother. The air gap 44 is optional and can be omitted if the selectiverelease of one or more multicomponent transfer units will not affect theneighbor multicomponent transfer units as in the case of multicomponenttransfer units 43 b and 43 c.

FIGS. 4 a-4 g show an embodiment of the preparation of a thermaltransfer element having a thin film transistor. The thermal transferelement is preferably fabricated by preparing a donor substrate 51 asshown in FIG. 4 a. Then the releasable adhesion layer 52 is coated onthe donor substrate (FIG. 4 b). A protective layer 53 is further coatedon the releasable adhesion layer 52 (FIG. 4 c). The protective layer 53serves as a base for the thin film transistor to be processed, or aprotective coating after transfer. Then the thin film transistor isfabricated on the protective layer 53. A gate 54 is first patterned onthe protective layer 53 (FIG. 4 d), followed by a silicon layer 55,serving as the transistor channel (FIG. 4 e). Source and drainimplantation is then fabricated together with the source and draininterconnects 57 and 58 (FIG. 4 f). The thin film transistor is thencoated with a passivation layer 58. The thin film transistor structureforms the multicomponent transfer unit 59. With the photo/heat exposure,the releasable adhesion layer 52 can be decomposed to release themulticomponent transfer unit 59 to a receptor.

Another embodiment of the present invention is the method of transfer.The multicomponent transfer layer or the multicomponent transfer unitscan be transferred from a thermal transfer element. The transfer methodcomprises the step of photoexposing and heating the releasable adhesionlayer to delaminate the adhesion layer, therefore releasing themulticomponent transfer layer or the multicomponent transfer units. Thephotoexposing and the heating steps can occur simultaneously, or theheating following the photoexposure step, or vice versa. The thermaltransfer element can be heated by directing heat to the thermal transferelement. Heat can be generated using a heating element (e.g., aresistive heating element), converting infrared radiation to heat,and/or applying an electrical current to a layer of the thermal transferelement to generate heat. In addition, light from, for example, a lampor laser, can be applied selectively on a portion of the thermaltransfer element. Light activated delamination is advantageous becauseof the accuracy, precision and flexibility that can often be achieved.The size and shape of the transferred pattern can be controlled by, forexample, selecting the size of the light beam, the exposure mask, theexposure pattern of the light beam, the duration of directed beamcontact with the thermal transfer element, and the materials of thethermal transfer element.

The multicomponent transfer units can be released and collected beforetransferring to a receptor substrate. The multicomponent transfer unitscan also be transferred directly to a receptor substrate by contactingthe transfer units with the receptor receiving surface before releasingthe adhesion layer. During transferring, the thermal transfer element istypically brought into intimate contact with the receptor. A compressiveforce or pressure may be used to improve the contact between themulticomponent transfer layer and the receptor substrate. In someinstances, vacuum can be used to hold the thermal transfer element inintimate contact with the receptor. The transfer layer or the receptorcan include an adhesive layer disposed on an outer surface to facilitateadhesion.

The receptor substrate may be any substrate suitable for a particularapplication including, but not limited to, transparent films, displaysubstrate, electronic displays, metals, semiconductors, glass, variouspapers, polymer substrate, and plastics.

The receptor substrate can already comprise other devices. The existingdevices on the receptor substrate can form electrical connection withthe device on the multicomponent transfer unit. For furthertransferring, the new device on the receptor substrate can betransferred again, with or without further processing, to anotherreceptor, and with or without forming electrical connections with thenew receptor.

FIGS. 5 a-5 c show an embodiment of the release of a multicomponenttransfer unit from the thermal transfer element. A plurality ofmulticomponent transfer units 63 a, 63 b and 63 c are disposed on areleasable adhesion layer 62 on a donor substrate 61 (FIG. 5 a). A heatsource 65 and a light source 64 are applied to the releasable adhesionlayer 62. The light source 64 can be applied selectively on themulticomponent transfer unit 63 b, preferably through a mask while theheat source 65 can be applied to the whole thermal transfer element. Thelight source 64 is chosen to be focused onto the selective transfer unit63 b while the heat source 65 is chosen to be applied nondiscriminatorily on the whole transfer element because it is much easierto focus the light source than to focus or restrict the heat source.Within the scope of the invention, either the heat source or the lightsource or both can be focused to selectively release the desiredmulticomponent transfer units. The intensity and magnitude of the lightand heat source are chosen to decompose the adhesion layer withoutdamaging the transfer units. Then the portion 62 b of the releasableadhesion layer receiving both light and heat will be decomposed (FIG. 5b) and the transfer unit 63 b will be released from the thermal transferelement (FIG. 5 c).

FIGS. 6 a-c show an embodiment of the transfer of a multicomponenttransfer unit from the thermal transfer element to a receptor. Aplurality of multicomponent transfer units 73 a, 73 b and 73 c aredisposed on a releasable adhesion layer 72 on a donor substrate 71 (FIG.6 a). A heat source 75 and a light source 74 are applied to thereleasable adhesion layer 72 together with the contact of the receptor76 receiving surface. Then the portion 72 b of the releasable adhesionlayer receiving both light and heat will be decomposed (FIG. 6 b) andthe transfer unit 73 b will be released from the thermal transferelement and transferred to the receptor 76 (FIG. 6 c). These figuresalso show that the transfer unit 73 b is forming electrical contact withthe receptor substrate through the transfer unit contact pad 77 and thereceptor contact pad 78. The electrical contact between the transferunit and the receptor substrate may or may not be needed depending on aparticular application.

The receptor can have a releasable adhesion layer coated on thereceiving surface so that together with the transferred multicomponenttransfer unit, it forms a new thermal transfer element. The device onthe multicomponent transfer unit of the newly formed thermal transferelement can be transferred again to a new receptor. FIGS. 7 a-7 g showthe transfer sequence of 2 consecutive transfers. Starting with athermal element 80 comprising a transfer unit 83 on a releasableadhesion layer 82 on a substrate 81, and a receptor 90 comprisinganother releasable adhesion layer 92 on a receptor substrate 91 (FIG. 7a). The thermal element 80 and the receptor 90 are brought into contactand the structure is subjected to a heat 84 and light 85 sources (FIG. 7b). Care should be taken so that the heat and light source 84 and 85only reach the adhesion layer 82 and not the adhesion layer 92 such asby coating a reflective layer on top of the transfer unit 83 or adhesionlayer 92 (not shown). Under the light and heat exposure, the adhesionlayer 82 is decomposed, leaving the transfer unit 83 transferred to thereceptor 91/92 to form a new thermal transfer element (FIG. 7 c). Thenew thermal transfer element is approached by a new receptor 93 (FIG. 7d). Notice the reversal in orientation of the transfer unit 83. The newstructure is again subjected to heat 94 and light 95 sources (FIG. 7 e).The adhesion layer 92 is decomposed (FIG. 70, leaving the new receptorwith the transfer unit 83 in the right orientation (FIG. 7 g).

In some instances, it may be necessary, desirable, or convenient tosequentially transfer two or more different thermal transfer elements.For example, one thermal transfer element may be used to form a firstdevice, and another thermal transfer element may be used to form asecond device on the same receptor substrate.

A wide variety of devices or layers that can be used to form the device,may be transferred by this method, for example (but not limited to):amorphous silicon thin film transistors, polycrystalline thin filmtransistors, organic transistors, field effect transistors, bipolartransistors, unijunction transistors, MOS transistors,metal-insulator-semiconductor transistors, organic or inorganic lightemitting devices, passive electronic elements such as resistors,capacitors and inductors, printed wiring, optical or optoelectronicdevices such as waveguides, splitters, lenses, gratings, holographicelements, filters, mirrors, couplers, combiners, modulators, opticalcavities, multiplexers and amplifiers, chemical or biochemical sensors,electronic circuitry, diodes, rectifiers, electroluminescent lamps,memory elements, charge coupled devices, integrated circuits,photodetectors, lasers, piezoelectric devices, ferroelectric devices, orthin film batteries.

In addition, either completed devices or individual layers of suchdevices may be transferred. Thus the technique is useful both fortransfer of complete devices from one substrate to another, or fortransfer of individual layers of devices in the fabrication process ofsuch devices. An OEL (organic electroluminescent) or an OLED (organiclight emitting diode) device can be formed by transferring thin layersof suitable organic materials sandwiched between a cathode and an anode.

In another embodiment, the present invention discloses a device disposedon a receptor substrate. The device is formed by transferring amulticomponent transfer unit from a thermal transfer element to areceptor substrate. The device is included in the multicomponenttransfer unit, and can form electrical contact with other existingdevices on the receptor.

Another embodiment of the present invention is the disclosure of acircuit or a display comprising a plurality of thin film transistordevices or components disposed on a receptor substrate. At least one ofthe thin film transistor devices or components is formed by transferringa multicomponent transfer unit from a thermal transfer element to thereceptor substrate. The circuit or the display can comprises a memorydevice, a portion of a memory device, a logic device or a portion of alogic device. The receptor substrate can comprise a memory device, aportion of a memory device, a logic device or a portion of a logicdevice. The circuit or the display and the receptor each can comprise aportion of a memory device, and together form a complete memory device.The circuit or the display comprises a plurality of first electrodes ofa cross bar memory device and the receptor comprises a plurality ofsecond electrodes of a cross bar memory device, and together form acomplete cross bar memory device. The circuit or the display and thereceptor each comprises a portion of a logic device, and together form acomplete logic device.

FIG. 8 shows an overall view of the transfer process of in the contextof web-based, or roll-to-roll transfer. The releasable adhesion layer102 is deposited on the donor substrate 101. The transfer layer 103 issubsequently deposited and processed on the releasable adhesion layer102. The donor substrate/releasable adhesion layer/transfer layercomposite is brought into contact with the receptor substrate 104 andexposed to a compressive force exerted by a pair of rolls 105 to form amultilayer. The multilayer is subjected to an impinging light 108through a pattern 109 (in this embodiment, a mask). Subsequently, themultilayer is exposed to a heat source 110 which causes the releasableadhesion layer 102 to decompose to a gas. The expansion of the gasforces the receptor substrate 104 away from the donor substrate 101while exerting a compressive force on the transferred unit 112 andreceptor substrate 104, enhancing the adhesion between the transferredunit 112 and the receptor substrate 104. The transferred unit 112adheres to the receptor substrate 104 and separates from the remainingtransfer layer 113 on the donor substrate 101.

FIG. 9 shows another embodiment of the present invention where areceptor substrate 124 already has some existing devices 125. Theexisting devices 125 on the receptor substrate 124 can be formed byconventional fabrication techniques such as deposition and etching, orcan be formed by a transfer method as shown in FIG. 8. FIG. 9 also showsa thermal transfer element comprises a plurality of transfer units 123adhering to a donor substrate 121 through a releasable adhesion layer122. The substrates 121 and 124 and the transfer unit 123 and theexisting devices 125 are brought into contact and exposed to acompressive force exerted by a pair of rolls 135 to form a multilayer.The multilayer is subjected to an impinging light 128 through a pattern129. Subsequently, the multilayer is exposed to a heat source 130 whichcauses the releasable adhesion layer 122 to decompose to a gas. Theexpansion of the gas forces the receptor substrate 124 away from thedonor substrate 121 while exerting a compressive force on thetransferred unit 123, the existing devices 125 and receptor substrate124, enhancing the adhesion between the transferred unit 123, theexisting devices 125 and the receptor substrate 124. The transferredunit 112 adheres to the existing devices 125 and the receptor substrate104 and separates from the donor substrate 121.

FIGS. 10 a-10 c show a sequence of the pattern transfer process.Existing devices 141 are fabricated on a receptor substrate 140, eitherby lamination/delamination transfer method as disclosed in the presentinvention, or by a conventional fabrication process (FIG. 10 a). Aplurality of devices 142 is transferred to the receptor substrate 140(FIG. 10 b). Then another plurality of devices 143 is transferred to thesame receptor substrate 140 (FIG. 10 c). In the second transfer, thedevices 143 overlap the existing devices 142 or 141. Thus the devicetransfer may result in separately distinguishable patterns or inoverlays.

The invention is preferably applicable in web-based, or roll-to-roll,coating, since it is expected to have a high degree of value in thiscontext, but it will be apparent that it is equally applicable to thetransfer of layers from one sheet of any substrate material to another,and that the roll-to-roll process is not in any way essential for thesuccessful practice of the invention. It is applicable to the transferof films from a rigid substrate to a flexible one, or vice versa. It mayalso be used to transfer films between rigid substrates, provided thatthey are flat enough to get sufficiently close approach of the surfaces.

1. A device disposed on a receptor substrate, formed by transferring amulticomponent transfer unit from a thermal transfer element to thereceptor substrate, using releasable adhesion layers that do notcontamination the transferred device since they decompose completely andleave no detectable residue.
 2. A device as in claim 1 wherein thereleasable adhesion layer comprising a polymer composition having a lowdelamination temperature in the presence of light, whereby allowing thedelamination of the adhesion layer to transfer the selectedmulticomponent units by exposing the selected multicomponent units tolight; and maintaining good adhesion between the donor substrate and thetransfer layer at a temperature higher than the delamination temperaturein the absence of light, whereby permitting processing themulticomponent transfer units at a temperature higher than thedelamination temperature.
 3. A device as in claim 1 wherein the thermaltransfer element comprises a donor substrate and a transfer layer with areleasable adhesion layer disposed between the donor substrate and thetransfer layer.
 4. A device as in claim 1, wherein the device is anorganic electroluminescent device, an organic transistor, or an organiclaser.
 5. A device as in claim 1, wherein the device comprises acomponent in electronic circuitry, an electronic device, a thin filmtransistor device, a memory device, or a display device.
 6. A device asin claim 1, wherein the device is in electrical contact with otherexisting devices on the receptor.
 7. A device as in claim 1, wherein thereceptor receiving surface comprises a releasable adhesion layer to forma thermal transfer element.
 8. A circuit comprising a plurality of thinfilm transistor devices disposed on a receptor substrate, at least oneof the thin film transistor device formed by transferring amulticomponent transfer unit from a thermal transfer element to thereceptor substrate using releasable adhesion layers that do notcontamination the transferred device since they decompose completely andleave no detectable residue.
 9. A circuit as in claim 8 wherein thereleasable adhesion layer comprising a polymer composition having a lowdelamination temperature in the presence of light, whereby allowing thedelamination of the adhesion layer to transfer the selectedmulticomponent units by exposing the selected multicomponent units tolight; and maintaining good adhesion between the donor substrate and thetransfer layer at a temperature higher than the delamination temperaturein the absence of light, whereby permitting processing themulticomponent transfer units at a temperature higher than thedelamination temperature.
 10. A circuit as in claim 8 wherein thethermal transfer element comprises a donor substrate and a transferlayer with a releasable adhesion layer disposed between the donorsubstrate and the transfer layer.
 11. A circuit as in claim 8, whereinthe circuit comprises a memory device or a portion of a memory device,or a logic device or a portion of a logic device.
 12. A circuit as inclaim 8, wherein the receptor substrate comprises a memory device or aportion of a memory device, or a logic device or a portion of a logicdevice.
 13. A circuit as in claim 8, wherein the circuit and thereceptor each comprises a portion of a memory or logic device, andtogether form a complete memory or logic device.
 14. A circuit as inclaim 8, wherein the circuit comprises a plurality of first electrodesof a cross bar memory device and the receptor comprises a plurality ofsecond electrodes of a cross bar memory device, and together form acomplete cross bar memory device.
 15. A display comprising a pluralityof components disposed on a receptor substrate, at least one of thecomponents formed by transferring a multicomponent transfer unit from athermal transfer element to the receptor substrate using releasableadhesion layers that do not contamination the transferred device sincethey decompose completely and leave no detectable residue.
 16. A displayas in claim 15 wherein the releasable adhesion layer comprising apolymer composition having a low delamination temperature in thepresence of light, whereby allowing the delamination of the adhesionlayer to transfer the selected multicomponent units by exposing theselected multicomponent units to light; and maintaining good adhesionbetween the donor substrate and the transfer layer at a temperaturehigher than the delamination temperature in the absence of light,whereby permitting processing the multicomponent transfer units at atemperature higher than the delamination temperature.
 17. A display asin claim 15 wherein the thermal transfer element comprises a donorsubstrate and a transfer layer with a releasable adhesion layer disposedbetween the donor substrate and the transfer layer.
 18. A display as inclaim 15, wherein the components of the display comprises a memory orlogic device or a portion of a memory or logic device.
 19. A display asin claim 15, wherein the receptor substrate comprises a memory or logicdevice or a portion of a memory or logic device.
 20. A display as inclaim 15, wherein the components of the display and the receptor eachcomprises a portion of a memory or logic device, and together form acomplete memory or logic device.